Verarbeitungsschritte von Einkristall-Siliziumbarren
Wichtige Erkenntnisse Ein Einkristall-Siliziumbarren durchläuft Zuschnitt, Durchmesser-Schleifen, in Scheiben schneidend, Kantenfasen, lapping and polishing before it is ready for lithography. Surface accuracy at the slicing stage determines how much downstream planarization work is required. Diamond wire slicing is the standard way to turn an ingot into bare wafers with tight thickness variation and low sub-surface damage. In der Phase der Herstellung von einkristallinen Siliziumwafern, the silicon single-crystal ingots need to be processed into raw silicon wafers or barewa-fers with high surface accuracy...
