What is the best cutting method for semiconductor materials?
For most semiconductor crystals, diamond wire sawing offers the best combination of narrow kerf, low sub-surface damage and throughput; brittle compounds like GaAs especially benefit from its low cutting force.
Why do different semiconductors need different cutting techniques?
They differ in hardness, brittleness and thermal sensitivity — silicon is well understood, while SiC and GaN are far harder, and GaAs is softer but extremely fragile.
Why is precision cutting so important in semiconductor manufacturing?
Surface damage and thickness variation created at slicing carry through lapping, polishing and lithography, directly affecting device yield.
抽象: This application report documents a high-precision straight-slicing test on BG38
glass sheet supplied by a European customer. The workpiece measured... 阅读更多